15 November 2011 3D fiber probe for multi sensor coordinate measurement
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Proceedings Volume 8321, Seventh International Symposium on Precision Engineering Measurements and Instrumentation; 83211N (2011) https://doi.org/10.1117/12.904709
Event: Seventh International Symposium on Precision Engineering Measurements and Instrumentation, 2011, Yunnan, China
Abstract
Increasing manufacturing accuracy requirements enforce the development of innovative and highly sensitive measuring tools. Especially for measurement with sub micrometer accuracy, the sensor principle has to be chosen appropriately for each measurement surface. Modern multi sensor coordinate measurements systems allow automatic selection of different sensor heads to measure different areas or properties of a sample. As example, different types of optical sensors as well as tactile sensors can be used with the same machine. In this paper we describe different principles of optical sensors used in multi sensor coordinate measurement systems as well as a new approach for tactile measurement with sub micrometer accuracy. A special fiber probe has been developed. The tip of the fiber probe is formed as a sphere. The lateral position of this sphere is observed by a microscope optics and can be determined to a fraction of a micrometer. Additionally, a novel optical set-up now even allows the determination of the z-position of the fiber tip with sub micrometer accuracy. For this purpose we use an interferometric set-up. The light of laser is coupled into the optical fiber. The light, exiting the fiber tip is collected by a microscope optics and superposed with a reference wave, generated directly from the laser. The result is an interferometric signal which is recorded by the camera and processed by a computer. With this set-up, the zdisplacement of the fiber sphere can be measured with an accuracy of a fraction of the used laser wavelength.
© (2011) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
A. Ettemeyer, A. Ettemeyer, } "3D fiber probe for multi sensor coordinate measurement", Proc. SPIE 8321, Seventh International Symposium on Precision Engineering Measurements and Instrumentation, 83211N (15 November 2011); doi: 10.1117/12.904709; https://doi.org/10.1117/12.904709
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