A glass tube micro-stylus probe for surface form metrology

Bin Xu; Yuki Shimizu; Wei Gao

doi:10.1117/12.904875

15 November 2011 A glass tube micro-stylus probe for surface form metrology

Bin Xu, Yuki Shimizu, Wei Gao

Proceedings Volume 8321, Seventh International Symposium on Precision Engineering Measurements and Instrumentation; 83211Z (2011) https://doi.org/10.1117/12.904875
Event: Seventh International Symposium on Precision Engineering Measurements and Instrumentation, 2011, Yunnan, China

Abstract

This paper presents a micro-stylus probe, which is composed of a precision glass micro-ball and a shaft made by a glass tube. The diameter of the micro-ball was 50 μm. The tip angle of the glass-tube shaft was approximately 10 degrees. Strength test shows that the tolerance of glass tube micro-stylus against external forces is 90 mN. To reduce the stick-slip phenomena, a micro-tapping probe employing the glass tube micro-stylus and a PZT actuator was demonstrated. The micro-stylus probe was mounted to an air-bearing displacement sensor for scanning surface form metrology. Experimental results showed that the micro-tapping probe was effective for reducing the influence of the stick-slip phenomena.

Citation Download Citation

Bin Xu, Yuki Shimizu, and Wei Gao "A glass tube micro-stylus probe for surface form metrology", Proc. SPIE 8321, Seventh International Symposium on Precision Engineering Measurements and Instrumentation, 83211Z (15 November 2011); https://doi.org/10.1117/12.904875

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