15 November 2011 A controlled-force laser interference profilometer
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Proceedings Volume 8321, Seventh International Symposium on Precision Engineering Measurements and Instrumentation; 83212E (2011) https://doi.org/10.1117/12.905003
Event: Seventh International Symposium on Precision Engineering Measurements and Instrumentation, 2011, Yunnan, China
Abstract
This paper presents a controlled-force laser interference surface measuring system, which can achieve high-precision surface profile measurements in a large range. The key technology of the system is the controlled-force laser interference displacement sensor based on Michelson interference principle. The system operates in micro-force by the voice coil motor (VCM) which alters the measuring contact force in real time and reduces the scratches caused by the stylus tip on the surfaces of the tested samples. The position of the stylus can also be changed, which avoids the damage of the system when the stylus scans across high steps or deep grooves. The optical and mechanical principles of the displacement sensor, the realization method of controllable measuring force and photoelectric signal processing are discussed in this paper. Additionally, this paper introduces the two-dimensional stage used for high precision scanner, and presents primitive experimental results.
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Bo Yang, Suping Chang, Tiebang Xie, Wen Pan, "A controlled-force laser interference profilometer", Proc. SPIE 8321, Seventh International Symposium on Precision Engineering Measurements and Instrumentation, 83212E (15 November 2011); doi: 10.1117/12.905003; https://doi.org/10.1117/12.905003
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