The investigation of mold life for glass thermal imprint

L. K. Chen; Y. M. Hung; C. K. Sung

doi:10.1117/12.905219

15 November 2011 The investigation of mold life for glass thermal imprint

L. K. Chen, Y. M. Hung, C. K. Sung

Proceedings Volume 8321, Seventh International Symposium on Precision Engineering Measurements and Instrumentation; 832134 (2011) https://doi.org/10.1117/12.905219
Event: Seventh International Symposium on Precision Engineering Measurements and Instrumentation, 2011, Yunnan, China

Abstract

Thermal imprint provides a stable and rapid approach in the fabrication of precision V-groove structures. This paper presents a theoretical and experimental study focusing on the estimation of mold life based on both the formation and wear mechanisms. In the experiment, BK-7 was used as the substrate, and the mold with V-groove patterns was fabricated with glassy carbon. The formation of V-groove microstructures on BK-7 glass substrate was implemented by a lab made thermal imprint equipment, while the precision of imprinted pattern was measured by an optical measurement system. Additionally, the micro-scale friction and wear theories were adopted to estimate the mold life. Finally, the prediction model of mold life can be estimated by the relative friction and wear theories and measurement data, which enable us to efficiently optimize the glass thermal imprint process.

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L. K. Chen, Y. M. Hung, and C. K. Sung "The investigation of mold life for glass thermal imprint", Proc. SPIE 8321, Seventh International Symposium on Precision Engineering Measurements and Instrumentation, 832134 (15 November 2011); https://doi.org/10.1117/12.905219

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