15 November 2011 Contouring error compensation on a micro coordinate measuring machine
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Proceedings Volume 8321, Seventh International Symposium on Precision Engineering Measurements and Instrumentation; 83213I (2011) https://doi.org/10.1117/12.905324
Event: Seventh International Symposium on Precision Engineering Measurements and Instrumentation, 2011, Yunnan, China
Abstract
In recent years, three-dimensional measurements of nano-technology researches have received a great attention in the world. Based on the high accuracy demand, the error compensation of measurement machine is very important. In this study, a high precision Micro-CMM (coordinate measuring machine) has been developed which is composed of a coplanar stage for reducing the Abbe´ error in the vertical direction, the linear diffraction grating interferometer (LDGI) as the position feedback sensor in nanometer resolution, and ultrasonic motors for position control. This paper presents the error compensation strategy including "Home accuracy" and "Position accuracy" in both axes. For the home error compensation, we utilize a commercial DVD pick-up head and its S-curve principle to accurately search the origin of each axis. For the positioning error compensation, the absolute positions relative to the home are calibrated by laser interferometer and the error budget table is stored for feed forward error compensation. Contouring error can thus be compensated if both the compensation of both X and Y positioning errors are applied. Experiments show the contouring accuracy can be controlled to within 50nm after compensation.
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Kuang-Chao Fan, Hung-Yu Wang, Jyun-Kuan Ye, "Contouring error compensation on a micro coordinate measuring machine", Proc. SPIE 8321, Seventh International Symposium on Precision Engineering Measurements and Instrumentation, 83213I (15 November 2011); doi: 10.1117/12.905324; https://doi.org/10.1117/12.905324
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