Synthesis and characterization of self-assembling block copolymers containing fluorine groups

Rina Maeda; Michelle Chavis; Nam-Ho You; Christopher K. Ober

doi:10.1117/12.916418

21 March 2012 Synthesis and characterization of self-assembling block copolymers containing fluorine groups

Rina Maeda, Michelle Chavis, Nam-Ho You, Christopher K. Ober

Proceedings Volume 8323, Alternative Lithographic Technologies IV; 83230E (2012) https://doi.org/10.1117/12.916418
Event: SPIE Advanced Lithography, 2012, San Jose, California, United States

Abstract

The fluorine-containing block copolymers of poly(styrene-block-2,2,2-trifluoroethyl methacrylate) (PS-b-PTFEMA) and poly(4-hydroxystyrene-block-2,2,2-trifluoroethyl methacrylate) (PHOST-b-PTFEMA), which all are capable of both top-down and bottom-up lithography were developed. The reported block copolymers were synthesized by either anionic polymerization or atom transfer radical polymerization (ATRP). Characterization of bulk and thin films were carried out using differential scanning calorimetry (DSC), transmission electron microscopy (TEM) and small angle X-ray scattering (SAXS). Thin films of the resulting block copolymers were subjected to conventional lithographic processing using e-beam and deep-UV radiation to create integrated patterns such as dots in lines.

Citation Download Citation

Rina Maeda, Michelle Chavis, Nam-Ho You, and Christopher K. Ober "Synthesis and characterization of self-assembling block copolymers containing fluorine groups", Proc. SPIE 8323, Alternative Lithographic Technologies IV, 83230E (21 March 2012); https://doi.org/10.1117/12.916418

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