Self-consistent field theory of directed self-assembly in laterally confined lamellae-forming diblock copolymers

Nabil Laachi; Hassei Takahashi; Kris T. Delaney; Su-Mi Hur; David Shykind; Corey J. Weinheimer; Glenn H. Fredrickson

doi:10.1117/12.916577

21 March 2012 Self-consistent field theory of directed self-assembly in laterally confined lamellae-forming diblock copolymers

Nabil Laachi, Hassei Takahashi, Kris T. Delaney, Su-Mi Hur, David Shykind, Corey J. Weinheimer, Glenn H. Fredrickson

Author Affiliations +

Proceedings Volume 8323, Alternative Lithographic Technologies IV; 83230K (2012) https://doi.org/10.1117/12.916577
Event: SPIE Advanced Lithography, 2012, San Jose, California, United States

Abstract

We use Self-Consistent Field Theory (SCFT) to study the directed self-assembly of laterally confined diblock copolymers. In this study, we focus on systems where the self-assembled lamellae are oriented parallel to the selective sidewalls of the channel. While well-ordered, perfect lamellae are observed both experimentally and numerically, undesirable defective structures also emerge. We therefore investigate the energetics of two isolated defects, dislocations and disclinations, for various chain lengths and channel dimensions and establish conditions that favor the formation of defects. We also determine the energy barrier and the transition path between the defective and perfect state using the string method.

Citation Download Citation

Nabil Laachi, Hassei Takahashi, Kris T. Delaney, Su-Mi Hur, David Shykind, Corey J. Weinheimer, and Glenn H. Fredrickson "Self-consistent field theory of directed self-assembly in laterally confined lamellae-forming diblock copolymers", Proc. SPIE 8323, Alternative Lithographic Technologies IV, 83230K (21 March 2012); https://doi.org/10.1117/12.916577

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