21 March 2012 Evaluation of ordering of directed self-assembly of block copolymers with pre-patterned guides for bit patterned media
Author Affiliations +
Abstract
Bit patterned media (BPM) is a promising candidate for next-generation magnetic recording media beyond 2.5 Tb/in2. To realize such high-density patterned media, directed self-assembling (DSA) technology is a possible solution to form fine dots. In order to read and write magnetic signals on a magnetic dot of magnetic media, the position of magnetic dots must be controlled. We examined ordering of directed self-assembly of diblock copolymer dots with a variety of prepatterned guides in some conditions and evaluated the ordering of the dots by using Delaunay triangulation and Voronoi diagram. Applying the optimized conditions, we obtained highly controlled dot pattern suitable for magnetic recording media.
© (2012) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Takeshi Okino, Takeshi Okino, Takuya Shimada, Takuya Shimada, Akiko Yuzawa, Akiko Yuzawa, Ryosuke Yamamoto, Ryosuke Yamamoto, Naoko Kihara, Naoko Kihara, Yoshiyuki Kamata, Yoshiyuki Kamata, Akira Kikitsu, Akira Kikitsu, Takashi Akahane, Takashi Akahane, You Yin, You Yin, Sumio Hosaka, Sumio Hosaka, } "Evaluation of ordering of directed self-assembly of block copolymers with pre-patterned guides for bit patterned media", Proc. SPIE 8323, Alternative Lithographic Technologies IV, 83230S (21 March 2012); doi: 10.1117/12.916304; https://doi.org/10.1117/12.916304
PROCEEDINGS
8 PAGES


SHARE
Back to Top