Paper
21 March 2012 Roll-to-roll manufacturing of electronic devices
N. A. Morrison, T. Stolley, U. Hermanns, U. Kroemer, A. Reus, A. Lopp, M. Campo, H. Landgraf
Author Affiliations +
Abstract
Roll-to-Roll (R2R) production of thin film based electronic devices (e.g. solar cells, activematrix TFT backplanes & touch screens) combine the advantages of the use of inexpensive, lightweight & flexible substrates with high throughput production. Significant cost reduction opportunities can also be found in terms of processing tool capital cost, utilized substrate area and process gas flow when compared with batch processing systems. Nevertheless, material handling, device patterning and yield issues have limited widespread utilization of R2R manufacturing within the electronics industry.
© (2012) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
N. A. Morrison, T. Stolley, U. Hermanns, U. Kroemer, A. Reus, A. Lopp, M. Campo, and H. Landgraf "Roll-to-roll manufacturing of electronic devices", Proc. SPIE 8323, Alternative Lithographic Technologies IV, 83231H (21 March 2012); https://doi.org/10.1117/12.918639
Advertisement
Advertisement
RIGHTS & PERMISSIONS
Get copyright permission  Get copyright permission on Copyright Marketplace
KEYWORDS
Manufacturing

Silicon

Coating

Optical lithography

Plasma enhanced chemical vapor deposition

Amorphous silicon

Flexible displays

RELATED CONTENT


Back to Top