Multiple columns for high-throughput complementary e-beam lithography (CEBL)

Enden D. Liu; Cong Tran; Ted Prescop; David K. Lam

doi:10.1117/12.916118

21 March 2012 Multiple columns for high-throughput complementary e-beam lithography (CEBL)

Enden D. Liu, Cong Tran, Ted Prescop, David K. Lam

Proceedings Volume 8323, Alternative Lithographic Technologies IV; 83231Y (2012) https://doi.org/10.1117/12.916118
Event: SPIE Advanced Lithography, 2012, San Jose, California, United States

Abstract

Developers of e-beam lithography systems are pursuing diverse strategies to bolster throughput. To achieve parallelism, some e-beam efforts focus on building multiple-columns, and others focus on developing columns with multiple beamlets. In this paper, we discuss the benefits and throughput of a multiple column approach for a particular application: Complementary E-Beam Lithography (CEBL). CEBL is a novel approach where the e-beam lithography system is used only to pattern the smallest features. Everything else is patterned with existing optical lithography equipment. By working hand-in-hand with optical lithography, CEBL provides an urgently needed solution to create next-generation microchips. Moreover, CEBL is extendable for multiple technology generations. We show how a multiple column approach is the best way to meet the requirements for CEBL, including high throughput, high resolution and overlay accuracy, without excess complexity or cost.

Citation Download Citation

Enden D. Liu, Cong Tran, Ted Prescop, and David K. Lam "Multiple columns for high-throughput complementary e-beam lithography (CEBL)", Proc. SPIE 8323, Alternative Lithographic Technologies IV, 83231Y (21 March 2012); https://doi.org/10.1117/12.916118

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available