Optimization of chemically amplified resist for high-volume manufacturing by electron-beam direct writing toward 14nm node and beyond

Jun-ichi Kon; Takashi Maruyama; Yoshinori Kojima; Yasushi Takahashi; Shinji Sugatani; Kozo Ogino; Hiromi Hoshino; Hideaki Isobe; Masaki Kurokawa; Akio Yamada

doi:10.1117/12.916305

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21 March 2012 Optimization of chemically amplified resist for high-volume manufacturing by electron-beam direct writing toward 14nm node and beyond

Jun-ichi Kon, Takashi Maruyama, Yoshinori Kojima, Yasushi Takahashi, Shinji Sugatani, Kozo Ogino, Hiromi Hoshino, Hideaki Isobe, Masaki Kurokawa, Akio Yamada

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Proceedings Volume 8323, Alternative Lithographic Technologies IV; 832324 (2012) https://doi.org/10.1117/12.916305
Event: SPIE Advanced Lithography, 2012, San Jose, California, United States

Abstract

We investigated a high-resolution chemically amplified resist for introducing a multi-column cell electron-beam directwriting system into the manufacturing of sub-14 nm technology node LSIs. The target of total blur, which leads to an exposure latitude above 10%, is less than 13.6 nm for 14 nm logic node LSIs. We divided the total blur into three terms, forward-scattering, electron-beam and resist. At a 40 nm-thick resist, the forward-scattering blur was calculated as 1.0 nm in lithography simulation, and beam blur was estimated to be 7.1 nm from the patterning results of hydrogen silsesquioxane. We found that there is a proportional relation between resist blur and acid diffusion length by using a new evaluation method that uses a water-soluble polymer. By applying a chemically amplified resist with a short acid diffusion length, resist blur decreased to 14.5 nm. Even though total blur is still 16.2 nm, we have already succeeded in resolving 20 nm line and space patterns at an exposure dose of 79.6 μC/cm².

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Jun-ichi Kon, Takashi Maruyama, Yoshinori Kojima, Yasushi Takahashi, Shinji Sugatani, Kozo Ogino, Hiromi Hoshino, Hideaki Isobe, Masaki Kurokawa, and Akio Yamada "Optimization of chemically amplified resist for high-volume manufacturing by electron-beam direct writing toward 14nm node and beyond", Proc. SPIE 8323, Alternative Lithographic Technologies IV, 832324 (21 March 2012); https://doi.org/10.1117/12.916305

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