Fabrication nanopillars pattern on PDMS using anodic aluminum oxide film as template

Yung-Chiang Ting; Shyi-Long Shy

doi:10.1117/12.916456

21 March 2012 Fabrication nano-pillars pattern on PDMS using anodic aluminum oxide film as template

Yung-Chiang Ting, Shyi-Long Shy

Proceedings Volume 8323, Alternative Lithographic Technologies IV; 83232H (2012) https://doi.org/10.1117/12.916456
Event: SPIE Advanced Lithography, 2012, San Jose, California, United States

Abstract

Nano-pillars pattern on PDMS were fabricated by using highly ordered and density nano-pore arrays of anodic aluminum oxide film as template. We used cyclohexane to dilute polydimethylsiloxane then filled it to template, the pillars diameters range from 100 to 200 nm, pillars height about 3 to 5 μm. The morphologies of template membrane and nanopillars arrays were investigated by scanning electron microscopy and atomic force microscopy. This process offered a cheaper and easier method to develop a large area and highly ordered nanostructure mold, this mold can be used in a broad range applications such as, optoelectronic devices, semiconductor devices, bio devices, field emission displays, data storage and so on.

Citation Download Citation

Yung-Chiang Ting and Shyi-Long Shy "Fabrication nano-pillars pattern on PDMS using anodic aluminum oxide film as template", Proc. SPIE 8323, Alternative Lithographic Technologies IV, 83232H (21 March 2012); https://doi.org/10.1117/12.916456

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