3 April 2012 Ultrahigh 22-nm resolution EUV coherent diffraction imaging using a tabletop 13-nm high harmonic source
Author Affiliations +
Abstract
We implement coherent diffractive imaging (CDI) using a phase-matched high-harmonic generation (HHG) source at 13 nm, demonstrating reconstructed images with a record 22 nm resolution for any tabletop, light-based microscope. We also demonstrate the first reflection-mode CDI using a compact extreme ultraviolet (EUV) source, achieving ≈100 nm resolution. A clear path towards even higher spatial resolution reflection-mode tabletop imaging using apertured-illumination schemes will be discussed.
© (2012) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Matthew D. Seaberg, Daniel E. Adams, Bosheng Zhang, Dennis F. Gardner, Margaret M. Murnane, Henry C. Kapteyn, "Ultrahigh 22-nm resolution EUV coherent diffraction imaging using a tabletop 13-nm high harmonic source", Proc. SPIE 8324, Metrology, Inspection, and Process Control for Microlithography XXVI, 83240D (3 April 2012); doi: 10.1117/12.916524; https://doi.org/10.1117/12.916524
PROCEEDINGS
7 PAGES


SHARE
Back to Top