Experiment analysis of absolute flatness testing

Xin Jia; Tingwen Xing; Wumei Lin; Zhijie Liao

doi:10.1117/12.916371

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3 April 2012 Experiment analysis of absolute flatness testing

Xin Jia, Tingwen Xing, Wumei Lin, Zhijie Liao

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Proceedings Volume 8324, Metrology, Inspection, and Process Control for Microlithography XXVI; 83242X (2012) https://doi.org/10.1117/12.916371
Event: SPIE Advanced Lithography, 2012, San Jose, California, United States

Abstract

Result of the testing contain the reference surface errors and test surface errors in the high-accuracy Phase shifting interferometer which test the relative phase between the two surface. The test accuracy can be achieved by removing the error of reference surface. In this case, one of body of so-called absolute testing must be used which can test the systematic errors, including the reference surface, of the instrument to be used to improve the test accuracy. The accuracy of the interferometer needs different methods to determine in the high accuracy testing. Even-Odd function method and rotation shear method is introduced in this paper. We use the Zygo interferometer Verifire Asphere to do the experiment and analyze the errors caused by data processing and interpolation. The result of the experiment can determine the accuracy of our arithmetic.

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Xin Jia, Tingwen Xing, Wumei Lin, and Zhijie Liao "Experiment analysis of absolute flatness testing", Proc. SPIE 8324, Metrology, Inspection, and Process Control for Microlithography XXVI, 83242X (3 April 2012); https://doi.org/10.1117/12.916371

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