Symmetric polarization aberration compensation method based on scalar aberration control for lithographic projection lens

Yuanying Tu; Xiangzhao Wang; Sikun Li; Lifeng Duan; Peng Bu

doi:10.1117/12.917909

13 March 2012 Symmetric polarization aberration compensation method based on scalar aberration control for lithographic projection lens

Yuanying Tu, Xiangzhao Wang, Sikun Li, Lifeng Duan, Peng Bu

Author Affiliations +

Proceedings Volume 8326, Optical Microlithography XXV; 83262T (2012) https://doi.org/10.1117/12.917909
Event: SPIE Advanced Lithography, 2012, San Jose, California, United States

Abstract

To minimize the adverse effects of polarization aberrations in the projection optical system, methods to compensate the polarization aberrations are required for high resolution lithography. In this paper, we propose a symmetric polarization aberration compensation method based on scalar aberration control for lithographic projection lens. This method focuses on the compensation of polarization aberrations induced by radially symmetric retardances. The foundation of the compensation method is the linear relationship between conventional even aberration and polarization aberration induced by radially symmetric retardances. The compensation accuracy is dependent on the even aberration adjustment accuracy of the projection lens and the sensitivity of the mask pattern to even aberrations. By this polarization aberration compensation method, the lithographic process window can be improved obviously.

Citation Download Citation

Yuanying Tu, Xiangzhao Wang, Sikun Li, Lifeng Duan, and Peng Bu "Symmetric polarization aberration compensation method based on scalar aberration control for lithographic projection lens", Proc. SPIE 8326, Optical Microlithography XXV, 83262T (13 March 2012); https://doi.org/10.1117/12.917909

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