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17 April 2012 Front Matter: Volume 8327
Proceedings Volume 8327, Design for Manufacturability through Design-Process Integration VI; 832701 (2012) https://doi.org/10.1117/12.928432
Event: SPIE Advanced Lithography, 2012, San Jose, California, United States
Abstract
This PDF file contains the front matter associated with SPIE Proceedings Volume 8327, including the Title Page, Copyright information, Table of Contents, and the Conference Committee listing.
© (2012) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
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"Front Matter: Volume 8327", Proc. SPIE 8327, Design for Manufacturability through Design-Process Integration VI, 832701 (17 April 2012); https://doi.org/10.1117/12.928432
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KEYWORDS
Visualization
Double patterning technology
Semiconductors
Design for manufacturability
Optical lithography
Design for manufacturing
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