14 March 2012 Design level variability analysis and parametric yield improvement methodology
Author Affiliations +
With the transition to the 32/28 nm platform parameter variations of device and circuit parameters are becoming increasingly important for performance, reliability and yield. Based on a sensitivity analysis, the paper compares the impact of lithography and CMP on circuit parameter variations. Coupling capacitances that can be described by geometrical parameters such as line width and thickness impact signal delay, crosstalk noise and power consumption. Variations of these capacitances thus contribute significantly to parametric yield loss. Based on field solver simulations the most critical devices and interconnections can be identified, providing valuable input during the chip design cycle.
© (2012) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Reinhard März, Reinhard März, Martin Keck, Martin Keck, "Design level variability analysis and parametric yield improvement methodology", Proc. SPIE 8327, Design for Manufacturability through Design-Process Integration VI, 83270H (14 March 2012); doi: 10.1117/12.916153; https://doi.org/10.1117/12.916153

Back to Top