Self-assembly patterning using block copolymer for advanced CMOS technology: optimisation of plasma etching process

T. Chevolleau; G. Cunge; M. Delalande; X. Chevalier; R. Tiron; S. David; M. Darnon; C. Navarro

doi:10.1117/12.916399

16 March 2012 Self-assembly patterning using block copolymer for advanced CMOS technology: optimisation of plasma etching process

T. Chevolleau, G. Cunge, M. Delalande, X. Chevalier, R. Tiron, S. David, M. Darnon, C. Navarro

Author Affiliations +

Proceedings Volume 8328, Advanced Etch Technology for Nanopatterning; 83280M (2012) https://doi.org/10.1117/12.916399
Event: SPIE Advanced Lithography, 2012, San Jose, California, United States

Abstract

The best strategy to transfer nanopatterns formed from the self assembly of PS/PMMA bloc copolymers into a silicon substrate is investigated. We show that a hard mask patterning strategy combined with a plasma cure treatment of the PS mask are necessary to reproduce the PS mask pattern into the silicon with a good critical dimension control. In addition, typical silicon etching plasma condition must be revisited to allow the etching of sub-20 nm holes. These results indicate that block copolymer can be readily used as etching masks for advanced CMOS technology.

Citation Download Citation

T. Chevolleau, G. Cunge, M. Delalande, X. Chevalier, R. Tiron, S. David, M. Darnon, and C. Navarro "Self-assembly patterning using block copolymer for advanced CMOS technology: optimisation of plasma etching process", Proc. SPIE 8328, Advanced Etch Technology for Nanopatterning, 83280M (16 March 2012); https://doi.org/10.1117/12.916399

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available