8 May 2012 Design and analysis of film bulk acoustic wave resonator in Ku-band frequency for wireless communication
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Abstract
This paper presents design of a Film Bulk Acoustic Wave Resonators (FBARs) consisting of piezoelectric film, aluminium nitride (AlN) with top and bottom electrodes of ruthenium (Ru). The lumped Butterworth-Van Dyke (BVD) Circuit model is used to investigate the theoretical harmonic response and extraction equivalent circuit of the FBAR. A three-dimensional (3D) Finite Element Method (FEM) is used to evaluate the electro-mechanical performance of the FBAR. The one-dimension (1D) numerical and the 3D FEM simulation results are analysed and compared. The results show that coupling coefficient (k2 eff) up to 7.0% can be obtained with optimised thickness ratio of electrode/piezoelectric layers. A Figure of Merit (FOM) that considers k2 eff and quality (Q) factor is used for comparison. The area of FBAR is 900μm2 and the active filter area size of the FBAR filter is 5400μm2. The FBAR filter is designed for operation in Kuband with centre frequency of 15.5 GHz and fractional bandwidth of 2.6%. The proposed FBAR filter has insertion loss of -2.3dB which will improve the performance of Ku-band transceiver and improve communication range and data rates in Ku-band communication links.
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N. Izza M. Nor, N. Izza M. Nor, K. Shah, K. Shah, J. Singh, J. Singh, N. Khalid, N. Khalid, Z. Sauli, Z. Sauli, "Design and analysis of film bulk acoustic wave resonator in Ku-band frequency for wireless communication", Proc. SPIE 8341, Active and Passive Smart Structures and Integrated Systems 2012, 83411R (8 May 2012); doi: 10.1117/12.915042; https://doi.org/10.1117/12.915042
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