27 March 2012 Development and performance study of a magnetic aerostatic vibration isolation platform
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This paper presents our development of a compact and magnetic-aerostatic vibration isolation platform for small equipments such as AFM-system, which combines the electromagnetic and aerostatic principles to create a semiactive damping effect. For the aerostatic principle, the concept of cap-shaped bearing form is applied to combine radial and axial bearings inside a cap-shaped air film to enhance the bearing capacity. The axial aerostatic bearing provides the main supporting force for the vibration isolation platform, and the radial aerostatic bearing creates frictionless and accurate guide for the platform. The electromagnetic coil is used to generate attractive force to counterbalance the axial aerostatic bearing force. Through this force counterbalance, not only the axial bearing stiffness can be minimized but also the axial position of the platform can be precisely controlled. In the axial positioning control, a hall element and a magnet are used to realize a non-contact displacement measurement with less loading effect. Besides, the robust PID control algorithm is chosen as the main core of the positioning control. For optimization and performance verification, finite element analyses and experiments are carried out to comprehend its electromagnetic and aerostatic effects.
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Keng-Ning Chang, Keng-Ning Chang, Kuang-Yuh Huang, Kuang-Yuh Huang, } "Development and performance study of a magnetic aerostatic vibration isolation platform", Proc. SPIE 8341, Active and Passive Smart Structures and Integrated Systems 2012, 834127 (27 March 2012); doi: 10.1117/12.917100; https://doi.org/10.1117/12.917100

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