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6 April 2012 Self-sensing tracking control for piezoelectric actuators based on sensor fusion
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Piezoelectric actuators are a popular choice in micro- and nano-positioning devices. Traditional sensorless position control approaches use a hysteresis mapping between voltage and position in a voltage feedforward control scheme. However, this mapping is affected by frequency, temperature, aging etc. Recently, charge control for positioning is also attracting interest among researchers due to the linear relationship between position and charge. Conversely, a sophisticated hardware design is required to minimize charge drift. This limits charge based controllers for practical applications. In this study, a new self-sensing control technique is proposed which requires neither an accurate inverse mapping nor a sophisticated charge controller. This technique uses a position estimate that is obtained by fusing a traditional charge based position measurement with a novel capacitance based position measurement. Upon achieving a reliable position estimate, it is shown that a traditional PI control scheme is sufficient for tracking applications. Different wave forms having multiple lifts and rates were tested. Error is reduced upto 75% using a self-sensing feedback control when compared to open loop actuation. These results compare well with traditional self-sensing control techniques found in literature.
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Mohammad N. Islam and Rudolf J. Seethaler "Self-sensing tracking control for piezoelectric actuators based on sensor fusion", Proc. SPIE 8345, Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems 2012, 834541 (6 April 2012);

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