19 April 2012 Design and fabrication of mechanical-resonance-based optical scanner using push-pull actuator
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Here we present the current status of our microfabricated SU-8 cantilever beam scanner for endoscopic examination. The current design has improved performance with the implementation of a MEMS based push-pull actuator. Fabrication of the SU-8 rib waveguide was measured to be ~5.0μm as compared to ~50μm in the previous design, further improves our spatial resolution. We have made it easier to couple an optical fiber into the device and achieved ~98% coupling efficiency by altering the system geometry. The proposed rib waveguide design also allows a relatively large waveguide cross section (4μm in height and 55μm in width) and broader band single mode operation (λ= 0.7μm to 1.3μm) with a minimum transmission loss (85% output transmission efficiency with Gaussian beam profile input). Our design provides a new means to create a 2-D raster scanning pattern, verified by transient finite element analysis (FEA). The scanner's line resolution and field of view (FOV) have been optimized through a parametric study using modal and harmonic analyses. This paper describes the fabrication and testing of our optical scanner, which may find application in the area of endoscopy, where there is a need for a minimally invasive device that reduces patient discomfort.
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Kebin Gu, Chi Leung Tsui, Joe Ho, Wei-Chih Wang, "Design and fabrication of mechanical-resonance-based optical scanner using push-pull actuator", Proc. SPIE 8348, Health Monitoring of Structural and Biological Systems 2012, 83480T (19 April 2012); doi: 10.1117/12.915283; https://doi.org/10.1117/12.915283


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