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Correcting image placement errors using registration control (RegC) technology in the photomask periphery
Investigation and mitigation of field-edge CDU fingerprint for ArFi lithography for 45-nm to sub-28-nm logic nodes
Improvements on Corner2, a lossless layout image compression algorithm for maskless lithography systems
The effect of puddle megasonic cleaning for advanced photomask with subresolution assist features (SRAFs)