31 May 2012 The estimation of thermal properties of μ-bolometers in a FPA with some selected structures and pitches
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Abstract
We present a thermal property estimation method required for a bolometer design and demonstrate the utilization of a presented method to the scaled μ-bolometers. The estimated thermal properties of 25μm pitch VOx bolometers with our presented method shows K=1.33x10-8 W/K, H=1.36x10-10 J/K, τth=10.2 ms for an active bolometer and K=1.64x10-6 W/K, H=1.82x10-10 J/K, τth=111 μs for a reference bolometer. These estimated thermal properties have a good agreement with the previous reports and with results from the FEM analyses carried on the same bolometer designs. The presented method is useful to estimate thermal properties of a scaled bolometer and to estimate thermal properties of a specific design.
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Seung-man Park, Seung-man Park, Seungoh Han, Seungoh Han, Chang Suk Han, Chang Suk Han, Hee Chul Lee, Hee Chul Lee, } "The estimation of thermal properties of μ-bolometers in a FPA with some selected structures and pitches", Proc. SPIE 8353, Infrared Technology and Applications XXXVIII, 83531J (31 May 2012); doi: 10.1117/12.919623; https://doi.org/10.1117/12.919623
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