Tunable THz absorption using Al/SiOx planar periodic structures

Brian Kearney; Fabio Alves; Dragoslav Grbovic; Gamani Karunasiri

doi:10.1117/12.918653

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8 May 2012 Tunable THz absorption using Al/SiO_x planar periodic structures

Brian Kearney, Fabio Alves, Dragoslav Grbovic, Gamani Karunasiri

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Proceedings Volume 8363, Terahertz Physics, Devices, and Systems VI: Advanced Applications in Industry and Defense; 836309 (2012) https://doi.org/10.1117/12.918653
Event: SPIE Defense, Security, and Sensing, 2012, Baltimore, Maryland, United States

Abstract

To increase the sensitivity of uncooled microbolometer-based THz imagers, absorbing structures (metamaterial films) with resonant absorption that can be tuned to a QCL illuminator frequency are investigated. The metamaterial films are comprised of periodic arrays of aluminum (Al) squares and an Al ground plane separated by a thin silicon-rich silicon oxide (SiO_x) dielectric film. Finite element simulations were performed by varying the structural parameters to establish the design criteria for high absorption, spectral tunability and bandwidth. Several structures with single band and multiband absorption characteristics were fabricated. Measured absorption spectra show absorption up to 100% at designed THz frequencies and the spectral characteristics agree with simulations.

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Brian Kearney, Fabio Alves, Dragoslav Grbovic, and Gamani Karunasiri "Tunable THz absorption using Al/SiO_x planar periodic structures", Proc. SPIE 8363, Terahertz Physics, Devices, and Systems VI: Advanced Applications in Industry and Defense, 836309 (8 May 2012); https://doi.org/10.1117/12.918653

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