Chip-to-chip SnO2 nanowire network sensors for room temperature H2 detection

A. Köck; E. Brunet; G. C. Mutinati; T. Maier; S. Steinhauer

doi:10.1117/12.919096

9 May 2012 Chip-to-chip SnO₂ nanowire network sensors for room temperature H₂ detection

A. Köck, E. Brunet, G. C. Mutinati, T. Maier, S. Steinhauer

Proceedings Volume 8366, Advanced Environmental, Chemical, and Biological Sensing Technologies IX; 83660O (2012) https://doi.org/10.1117/12.919096
Event: SPIE Defense, Security, and Sensing, 2012, Baltimore, Maryland, United States

Abstract

The employment of nanowires is a very powerful strategy to improve gas sensor performance. We demonstrate a gas sensor device, which is based on silicon chip-to-chip synthesis of ultralong tin oxide (SnO₂) nanowires. The sensor device employs an interconnected SnO₂ nanowire network configuration, which exhibits a huge surface-to-volume ratio and provides full access of the target gas to the nanowires. The chip-to-chip SnO₂ nanowire device is able to detect a H₂ concentration of only 20 ppm in synthetic air with ~ 60% relative humidity at room temperature. At an operating temperature of 300°C a concentration of 50 ppm H₂ results in a sensitivity of 5%. At this elevated temperature the sensor shows a linear response in a concentration range between 10 ppm and 100 ppm H₂. The SnO₂-nanowire fabrication procedure based on spray pyrolysis and subsequent annealing is performed at atmospheric pressure, requires no vacuum and allows upscale of the substrate to a wafer size. 3D-integration with CMOS chips is proposed as viable way for practical realization of smart nanowire based gas sensor devices for the consumer market.

Citation Download Citation

A. Köck, E. Brunet, G. C. Mutinati, T. Maier, and S. Steinhauer "Chip-to-chip SnO₂ nanowire network sensors for room temperature H₂ detection", Proc. SPIE 8366, Advanced Environmental, Chemical, and Biological Sensing Technologies IX, 83660O (9 May 2012); https://doi.org/10.1117/12.919096

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available