9 May 2012 Chip-to-chip SnO2 nanowire network sensors for room temperature H2 detection
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Abstract
The employment of nanowires is a very powerful strategy to improve gas sensor performance. We demonstrate a gas sensor device, which is based on silicon chip-to-chip synthesis of ultralong tin oxide (SnO2) nanowires. The sensor device employs an interconnected SnO2 nanowire network configuration, which exhibits a huge surface-to-volume ratio and provides full access of the target gas to the nanowires. The chip-to-chip SnO2 nanowire device is able to detect a H2 concentration of only 20 ppm in synthetic air with ~ 60% relative humidity at room temperature. At an operating temperature of 300°C a concentration of 50 ppm H2 results in a sensitivity of 5%. At this elevated temperature the sensor shows a linear response in a concentration range between 10 ppm and 100 ppm H2. The SnO2-nanowire fabrication procedure based on spray pyrolysis and subsequent annealing is performed at atmospheric pressure, requires no vacuum and allows upscale of the substrate to a wafer size. 3D-integration with CMOS chips is proposed as viable way for practical realization of smart nanowire based gas sensor devices for the consumer market.
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A. Köck, A. Köck, E. Brunet, E. Brunet, G. C. Mutinati, G. C. Mutinati, T. Maier, T. Maier, S. Steinhauer, S. Steinhauer, } "Chip-to-chip SnO2 nanowire network sensors for room temperature H2 detection", Proc. SPIE 8366, Advanced Environmental, Chemical, and Biological Sensing Technologies IX, 83660O (9 May 2012); doi: 10.1117/12.919096; https://doi.org/10.1117/12.919096
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