3 May 2012 Microsystems: Technology Enabler
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Abstract
Microelectronics and microsystems have been part of the key technologies that enabled the incredible pace of development we have seen over the last five to six decades. This paper presents a basic view in terms of technology development supporting new approaches to generation and transfer of knowledge for critical activities, one of the key ones being the ability to capture, store and more efficiently use energy.
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Murat Okandan, "Microsystems: Technology Enabler", Proc. SPIE 8373, Micro- and Nanotechnology Sensors, Systems, and Applications IV, 83731X (3 May 2012); doi: 10.1117/12.921338; https://doi.org/10.1117/12.921338
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