Spectral imaging device based on a tuneable MEMS Fabry-Perot interferometer

Jarkko Antila; Rami Mannila; Uula Kantojärvi; Christer Holmlund; Anna Rissanen; Ismo Näkki; Jyrki Ollila; Heikki Saari

doi:10.1117/12.919271

17 May 2012 Spectral imaging device based on a tuneable MEMS Fabry-Perot interferometer

Jarkko Antila, Rami Mannila, Uula Kantojärvi, Christer Holmlund, Anna Rissanen, Ismo Näkki, Jyrki Ollila, Heikki Saari

Proceedings Volume 8374, Next-Generation Spectroscopic Technologies V; 83740F (2012) https://doi.org/10.1117/12.919271
Event: SPIE Defense, Security, and Sensing, 2012, Baltimore, Maryland, United States

Abstract

The trend in the development of single-point spectrometric sensors is miniaturization, cost reduction and increase of functionality and versatility. MEMS Fabry-Perot interferometers (FPI) have been proven to meet many of these requirements in the form of miniaturized spectrometer modules and tuneable light sources. Recent development of MEMS FPI devices based on ALD thin film structures potentially addresses all of these main trends. In this paper we present a device and first measurement results of a small imaging spectrometer utilizing a 1.5 mm tuneable MEMS FPI filter working in the visible range of 430-580 nm. The construction of the instrument and the properties of the tuneable filter are explained especially from imaging requirements point of view.

Citation Download Citation

Jarkko Antila, Rami Mannila, Uula Kantojärvi, Christer Holmlund, Anna Rissanen, Ismo Näkki, Jyrki Ollila, and Heikki Saari "Spectral imaging device based on a tuneable MEMS Fabry-Perot interferometer", Proc. SPIE 8374, Next-Generation Spectroscopic Technologies V, 83740F (17 May 2012); https://doi.org/10.1117/12.919271

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