Paper
23 March 1988 Fiber Optic Temperature Sensor Using Spectral Modulation
J. C. Hartl, E. W. Saaski, G. L. Mitchell
Author Affiliations +
Proceedings Volume 0838, Fiber Optic and Laser Sensors V; (1988) https://doi.org/10.1117/12.942516
Event: Cambridge Symposium on Fiber Optics and Integrated Optoelectronics, 1987, Cambridge, MA, United States
Abstract
The refractive index of a material such as silicon changes rapidly with temperature at wavelengths near the band edge. This phenomenon can be used to sense temperature if the silicon or other material is used as a Fabry-Perot etalon. As temperature changes and the index varies, the etalon's spectral reflection characteristics will be affected. Using this effect and a spectral distribution readout technique it is possible to construct an optical temperature sensor with many desirable properties. These include a wide temperature range, typically -100 to + 400°C, long-term stability, insensitivity to connector and fiber losses, tolerance of fiber bending effects and rapid response. These sensors are fabricated using techniques similar to those used to manufacture semiconductor devices. This results in low production costs and the ability to produce sensors with reproducible performance.
© (1988) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
J. C. Hartl, E. W. Saaski, and G. L. Mitchell "Fiber Optic Temperature Sensor Using Spectral Modulation", Proc. SPIE 0838, Fiber Optic and Laser Sensors V, (23 March 1988); https://doi.org/10.1117/12.942516
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CITATIONS
Cited by 16 scholarly publications and 4 patents.
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KEYWORDS
Sensors

Connectors

Silicon

Fiber optics sensors

Fiber optics

Temperature sensors

Semiconducting wafers

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