23 March 1988 Multimode Fiber Optic Pressure Sensor With Extended Range
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Proceedings Volume 0838, Fiber Optic and Laser Sensors V; (1988) https://doi.org/10.1117/12.942488
Event: Cambridge Symposium on Fiber Optics and Integrated Optoelectronics, 1987, Cambridge, MA, United States
Abstract
Absolute and differential fiber optic pressure sensors are described in this paper that have .1% resolution and are produced by integrated circuit techniques with yields of thousands per 3" wafer. Sensor performance can be tailored to application with full scale responses ranging from 5" of water (9 mmHg) to greater than 1000 psi (700KPa).
© (1988) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
E. W. Saaski, E. W. Saaski, J. C. Hartl, J. C. Hartl, G. L. Mitchell, G. L. Mitchell, R. A. Wolthuis, R. A. Wolthuis, M. A. Afromowitz, M. A. Afromowitz, } "Multimode Fiber Optic Pressure Sensor With Extended Range", Proc. SPIE 0838, Fiber Optic and Laser Sensors V, (23 March 1988); doi: 10.1117/12.942488; https://doi.org/10.1117/12.942488
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