Temperature Measurement Utilizing Hydrogenated Amorphous Silicon Films

L.C. Guedes Valente; S. S Camargo Jr.; E. A. Soares

doi:10.1117/12.942514

23 March 1988 Temperature Measurement Utilizing Hydrogenated Amorphous Silicon Films

L.C. Guedes Valente, S. S Camargo Jr., E. A. Soares

Proceedings Volume 0838, Fiber Optic and Laser Sensors V; (1988) https://doi.org/10.1117/12.942514
Event: Cambridge Symposium on Fiber Optics and Integrated Optoelectronics, 1987, Cambridge, MA, United States

Abstract

In this work the feasibility of utilizing hydrogenated amorphous silicon (a-Si:H) films in optical fiber temperature sensors is demonstrated. In this sensor, a-Si:H films are deposited from the glow discharge decomposition of silane gas directly on fiber ends, followed by an aluminum layer obtained by vacuum evaporation. In this manner, the a-Si:H acts like a low-pass filter which cut-off frequency is temperature dependent, modulating the light intensity wich is reflected back into the fiber. This arrangement provides excelent mechanical rigidity and minimum dimensions, limited only by the fiber diameter. Preliminary results, using films deposited at 250°C and a HeNe laser as light source, showed a linear 50% variation in the detected signal, for a 50° C to 200°C temperature variation. In order to obtain similar effects for a 0.8μm LED, thermal annealed films are used.

Citation Download Citation

L.C. Guedes Valente, S. S Camargo Jr., and E. A. Soares "Temperature Measurement Utilizing Hydrogenated Amorphous Silicon Films", Proc. SPIE 0838, Fiber Optic and Laser Sensors V, (23 March 1988); https://doi.org/10.1117/12.942514

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available