26 April 2012 Electrostatic MEMS-based attenuator for optical communication
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Proceedings Volume 8410, Optical Technologies for Telecommunications 2011; 841006 (2012) https://doi.org/10.1117/12.923171
Event: Optical Technologies for Telecommunications 2011 (OTT 2011), 2011, Kazan, Tatarstan, Russian Federation
Optical microelectromechanical systems (MEMS) technology or micro-optoelectromechanical systems (MOEMS) technology has experienced rapid growth in recent years and find its application in modern telecommunications, including fiber optics. This technology can provide high-performance features and new functionalities for optical and communication systems. Therefore due to their widespread applications, MEMS variable optical attenuators (VOA) have been one of the most attractive fiber optic components.
© (2012) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
A. R. Nigmatulin, A. R. Nigmatulin, R. I. Zakiev, R. I. Zakiev, T. S. Sadeev, T. S. Sadeev, "Electrostatic MEMS-based attenuator for optical communication", Proc. SPIE 8410, Optical Technologies for Telecommunications 2011, 841006 (26 April 2012); doi: 10.1117/12.923171; https://doi.org/10.1117/12.923171


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