24 October 2012 Fabrication of surface plasmon waveguides in CYTOP
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Proceedings Volume 8412, Photonics North 2012; 84120X (2012) https://doi.org/10.1117/12.2001352
Event: Photonics North 2012, 2012, Montréal, Canada
There is considerable interest in Long-Range Surface Plasmon-Polariton (LRSPP) waves, which inherently have a low attenuation, for sensing applications. LRSPPs propagating along thin metal stripes arranged as integrated optical structures, such as Mach-Zehnder interferometers (MZIs), are or particular interest for biosensing. In order for sensors to be functional, high-quality metal stripe waveguides integrated with microfluidic channels are required. Wafer-based fabrication processes have been developed and implemented to fabricate thin (35 nm) Au stripes and features embedded into CYTOP claddings, with etched microfluidic channels exposing sections of the stripes for sensing. CYTOP is a fluoropolymer having a refractive index close to that of water, motivating its use as a cladding material. The fabrication processes developed are discussed and measurements (physical and optical) on operating sensors are presented.
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Hamoudi Asiri, Hamoudi Asiri, Asad Khan, Asad Khan, Ewa Lisicka-Skrzek, Ewa Lisicka-Skrzek, R. Niall Tait, R. Niall Tait, Pierre Berini, Pierre Berini, "Fabrication of surface plasmon waveguides in CYTOP", Proc. SPIE 8412, Photonics North 2012, 84120X (24 October 2012); doi: 10.1117/12.2001352; https://doi.org/10.1117/12.2001352

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