Study on combination technology in off-axis asphere manufacture

Yin Wang; Shengyi Li; Xiao-qiang Peng; Xuqing Nie; Ci Song

doi:10.1117/12.977297

16 October 2012 Study on combination technology in off-axis asphere manufacture

Yin Wang, Shengyi Li, Xiao-qiang Peng, Xuqing Nie, Ci Song

Proceedings Volume 8416, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 84160E (2012) https://doi.org/10.1117/12.977297
Event: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2012), 2012, Xiamen, China

Abstract

Combination technology of MRF and sub-aperture smoothing in off-axis asphere manufacture was researched. The asphere polishing with computer control polishing is not very deterministic , as removal rate of computer control polishing is variation over time in asphere polishing due to the tool misfit, pad wear, or slurry variation. Magnetorheological Finishing is deterministic, subaperture finishing technology in asphere manufacture, but it is limited to smooth mid-spatial-frequencies and high-spatial-frequencies. An example was given in a 290mm circle aperture offaxis aspherical optic polishing process with combination technology of MRF and sub-aperture smoothing. The final figure error was λ/50 rms from the initial 0.8λ rms. The result shows that the combination technology is practical and have high convergence efficiency.

Citation Download Citation

Yin Wang, Shengyi Li, Xiao-qiang Peng, Xuqing Nie, and Ci Song "Study on combination technology in off-axis asphere manufacture", Proc. SPIE 8416, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 84160E (16 October 2012); https://doi.org/10.1117/12.977297

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