16 October 2012 Analysis of chemical polishing for optical elements
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Proceedings Volume 8416, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 84161N (2012) https://doi.org/10.1117/12.977233
Event: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2012), 2012, Xiamen, China
Abstract
It is impossible to polish the groove or channel’s surface by traditional method. Chemical polishing, using solutions to erode glass, is adopted in this paper with the aim for getting smooth surface. Nature of glass, composition of polishing slurry, type of polishing products, and some process parameters are studied; in the meanwhile, SEM, metallurgical microscope, profile meter and Visible-UV spectrophotometer are utilized. The result shows that the polished surfaces with high quality depend on the buffering effect of polishing solution, high solubility to polishing products, smaller size of generated salt crystal. Also, it is indispensable to select proper temperature, time and removal rate to realize precision polishing.
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Lingyan Jiao, Lingyan Jiao, Yuzhu Jin, Yuzhu Jin, Nana Lin, Nana Lin, Tao Liu, Tao Liu, Yi Tong, Yi Tong, Dongxun Wu, Dongxun Wu, Changshun Hui, Changshun Hui, } "Analysis of chemical polishing for optical elements", Proc. SPIE 8416, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 84161N (16 October 2012); doi: 10.1117/12.977233; https://doi.org/10.1117/12.977233
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