16 October 2012 Optical aligning and measuring methods for large aperture optical system
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Proceedings Volume 8416, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 84162F (2012) https://doi.org/10.1117/12.978167
Event: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2012), 2012, Xiamen, China
Abstract
How to implement high accuracy measurement of large-aperture coaxial optical system is crucial to the optical alignment and optical property evaluation. The methods of image quality measurement including interferometer-collimating testing, wave front testing by using Hartmann, image processing and analysis of out-of-focus image were introduced. Both the advantages and disadvantages of the three methods were compared, which showed that the alignment method based on interferometer-collimating testing is the one with the highest accuracy. The method of computer-aided alignment (CAA) based on interferometer-collimating was discussed in detail. By using a ZYGO interferometer, interferograms with different field of views and a series of Zernike coefficients were obtained to express the disalignment of the system, and then these incorrect parameters were calculated by CAA algorithms. An alignment experiment of coaxial three-mirror system with 4m focal length and 500mm aperture was carried out. The RMS value of the system is lower than 0.07λ after iterations, which is close to the optical diffraction limit, proving the effectiveness of CAA method in alignment guidance.
© (2012) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Xue-min Zhang, Ru-yi Wei, Jia-you Duan, Jian-feng Yang, Hua Li, Xiaohua Hou, "Optical aligning and measuring methods for large aperture optical system", Proc. SPIE 8416, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 84162F (16 October 2012); doi: 10.1117/12.978167; https://doi.org/10.1117/12.978167
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