15 October 2012 Comparison and analysis of three different methods for the paraboloid testing
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Proceedings Volume 8417, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 841704 (2012) https://doi.org/10.1117/12.977929
Event: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2012), 2012, Xiamen, China
Abstract
Paraboloid is a special asphere and is widely used in optical system. This paper is focused on the Paraboloid testing error analysis and synthesis in practical. A paraboloid from ZYGO is tested using three different methods which are computer generated hologram (CGH), small ball and multi-zone stitching metrology method. The three methods are realized in a fine controlled lab utilizing ZYGO FIZEAU interferometer and the test results are compared and analyzed. Error synthesis is also performed and the uncertainty of the tests is less than 4.5nm.
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Er-long Miao, Er-long Miao, } "Comparison and analysis of three different methods for the paraboloid testing", Proc. SPIE 8417, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 841704 (15 October 2012); doi: 10.1117/12.977929; https://doi.org/10.1117/12.977929
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