15 October 2012 New half-film method for measuring Al2O3 film MTF of 3rd generation image intensifier
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Proceedings Volume 8417, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 84170G (2012) https://doi.org/10.1117/12.975927
Event: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2012), 2012, Xiamen, China
Abstract
In 3rd generation image intensifier, Al2O3 film on the input of MCP is a serious influence factor on device MTF due to its electron scattering process. There are no reportes about how to measure the MTF of Al2O3 film. In this paper a new Half-film comparssion test method is creatively established for determing the film MTF, which overcomes the difficulty of measuring super thin film less than a few nm. In this way, the MTF curves of 10nm Al2O3 film can be accurately obtained. The measurement results show that 10nm Al2O3 film obviously decay the MTF performance of the 3rd generation image intensifier and take an important role in the improvement work of 3rd generation image intensifier MTF and resolution performances.
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Yaojin Cheng, Yaojin Cheng, Feng Shi, Feng Shi, Xiaofeng Bai, Xiaofeng Bai, Yufeng Zhu, Yufeng Zhu, Lei Yan, Lei Yan, Feng Liu, Feng Liu, Min Li, Min Li, "New half-film method for measuring Al2O3 film MTF of 3rd generation image intensifier", Proc. SPIE 8417, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 84170G (15 October 2012); doi: 10.1117/12.975927; https://doi.org/10.1117/12.975927
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