New half-film method for measuring Al2O3 film MTF of 3rd generation image intensifier

Yaojin Cheng; Feng Shi; Xiaofeng Bai; Yufeng Zhu; Lei Yan; Feng Liu; Min Li

doi:10.1117/12.975927

15 October 2012 New half-film method for measuring Al₂O₃ film MTF of 3rd generation image intensifier

Yaojin Cheng, Feng Shi, Xiaofeng Bai, Yufeng Zhu, Lei Yan, Feng Liu, Min Li

Proceedings Volume 8417, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 84170G (2012) https://doi.org/10.1117/12.975927
Event: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2012), 2012, Xiamen, China

Abstract

In 3rd generation image intensifier, Al₂O₃ film on the input of MCP is a serious influence factor on device MTF due to its electron scattering process. There are no reportes about how to measure the MTF of Al₂O₃ film. In this paper a new Half-film comparssion test method is creatively established for determing the film MTF, which overcomes the difficulty of measuring super thin film less than a few nm. In this way, the MTF curves of 10nm Al₂O₃ film can be accurately obtained. The measurement results show that 10nm Al₂O₃ film obviously decay the MTF performance of the 3rd generation image intensifier and take an important role in the improvement work of 3rd generation image intensifier MTF and resolution performances.

Citation Download Citation

Yaojin Cheng, Feng Shi, Xiaofeng Bai, Yufeng Zhu, Lei Yan, Feng Liu, and Min Li "New half-film method for measuring Al₂O₃ film MTF of 3rd generation image intensifier", Proc. SPIE 8417, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 84170G (15 October 2012); https://doi.org/10.1117/12.975927

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