15 October 2012 Wavefront error sensing based on phase diversity technology and image restoration
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Proceedings Volume 8417, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 84170R (2012) https://doi.org/10.1117/12.970394
Event: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2012), 2012, Xiamen, China
Abstract
Phase Diversity (PD) is a kind of wavefront sensing technology based on image collecting and restoration. Two images are collected with different defocus values, and the Zernike coefficients of the system wavefront can be solved. This paper focuses on the algorithm of PD technology and image restoration. Several kinds of wavefront aberration and different defocus distance are also introduced to verify the robustness of the algorithm. Results show that the maximum wavefront aberration introduced is 1.5851λ (RMS) when the residual error of calculation required is less than λ/50 (RMS), and the residual error reaches minimum when the Zernike coefficient variation induced by defocus is 1λ. Also, the Structural Similarity (SSIM) is selected to evaluate the quality of restored images.
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Qiang Cheng, Qiang Cheng, Fazhi Li, Fazhi Li, Xiaoping Tao, Xiaoping Tao, Feng Yan, Feng Yan, Xuejun Zhang, Xuejun Zhang, } "Wavefront error sensing based on phase diversity technology and image restoration", Proc. SPIE 8417, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 84170R (15 October 2012); doi: 10.1117/12.970394; https://doi.org/10.1117/12.970394
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