Analysis and experiment of random ball test

Liming Lu; Fan Wu; Xi Hou; Can Zhang

doi:10.1117/12.971456

15 October 2012 Analysis and experiment of random ball test

Liming Lu, Fan Wu, Xi Hou, Can Zhang

Proceedings Volume 8417, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 84170X (2012) https://doi.org/10.1117/12.971456
Event: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2012), 2012, Xiamen, China

Abstract

Robert E.Parks from National Institute of Standards and Technology (NIST), America, first reported Random Ball Test (RBT), which is used to measure the absolute error of the reference surface of the interferometer. The basic course of this technology as followed: first, assemble the Random Ball in the confocal position of the interferometer system; then, measure the surface of the Random Ball and record the result; rotate the Random Ball to another position, meanwhile make sure that the Random Ball is in the confocal position all the time; In the new position, measure the surface of the Random Ball and record it again; repeat enough times as above, calculate the mean result of the measuring results, and this mean result is just the absolute error of the reference surface of the interferometer. Since 1998, other scholars have continued Robert E.Parks's research, and created a new type of the RBT. In this new technology, Random Ball is sustained by high pressure airflow, suspending in the air, and rotating around sphere center. This technology is called Dynamic Random Ball Test (DRBT), because the Random Ball is rotating during measurement. This article mainly reported the experiment study about the DRBT.

Citation Download Citation

Liming Lu, Fan Wu, Xi Hou, and Can Zhang "Analysis and experiment of random ball test", Proc. SPIE 8417, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 84170X (15 October 2012); https://doi.org/10.1117/12.971456

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KEYWORDS

Calibration

Interferometers

Time metrology

Confocal microscopy

Optical spheres

Photovoltaics

Phase interferometry

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