Plasma spectrum peak extraction algorithm of laser film damage

Dan Zhao; Jun-hong Su; Jun-qi Xu

doi:10.1117/12.973677

15 October 2012 Plasma spectrum peak extraction algorithm of laser film damage

Dan Zhao, Jun-hong Su, Jun-qi Xu

Proceedings Volume 8417, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 84171R (2012) https://doi.org/10.1117/12.973677
Event: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2012), 2012, Xiamen, China

Abstract

The plasma spectrometry is an emerging method to distinguish the thin-film laser damage. Laser irradiation film surface occurrence of flash, using the spectrometer receives the flash spectrum, extracting the spectral peak, and by means of the spectra of the thin-film materials and the atmosphere has determine the difference, as a standard to determine the film damage. Plasma spectrometry can eliminate the miscarriage of justice which caused by atmospheric flashes, and distinguish high accuracy. Plasma spectra extraction algorithm is the key technology of Plasma spectrometry. Firstly, data de noising and smoothing filter is introduced in this paper, and then during the peak is detecting, the data packet is proposed, and this method can increase the stability and accuracy of the spectral peak recognition. Such algorithm makes simultaneous measurement of Plasma spectrometry to detect thin film laser damage, and greatly improves work efficiency.

Citation Download Citation

Dan Zhao, Jun-hong Su, and Jun-qi Xu "Plasma spectrum peak extraction algorithm of laser film damage", Proc. SPIE 8417, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 84171R (15 October 2012); https://doi.org/10.1117/12.973677

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