Error analysis of Gaussian spot width measured with CCD sensor

Yuanxing He; Xinyang Li

doi:10.1117/12.970553

15 October 2012 Error analysis of Gaussian spot width measured with CCD sensor

Yuanxing He, Xinyang Li

Author Affiliations +

Proceedings Volume 8417, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 841720 (2012) https://doi.org/10.1117/12.970553
Event: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2012), 2012, Xiamen, China

Abstract

The system errors and random errors of a CCD sensor cause measurement errors of a laser spot width. Taking the Gaussian spot as example, the computer simulation method is used to analyze the influences of the measurement window size, the non-ideal integral sampling, the number of quantization lever and the read-out noise on the measurement precision of Gaussian spot width respectively, and the synthesized influences of these four kinds of error sources of the laboratory 8-bit CCD sensor on the measurement precision of Gaussian spot width. An optimal measurement window size is given. Simulation results are analyzed and discussed.

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Yuanxing He and Xinyang Li "Error analysis of Gaussian spot width measured with CCD sensor", Proc. SPIE 8417, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 841720 (15 October 2012); https://doi.org/10.1117/12.970553

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