Detection of moving mirror tilt in Fourier transform infrared spectrometer

Xiaojie Sun; Jianwen Hua; Zuoxiao Dai; Xiang Xia; Tao Li; Zhirui Wang

doi:10.1117/12.975180

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15 October 2012 Detection of moving mirror tilt in Fourier transform infrared spectrometer

Xiaojie Sun, Jianwen Hua, Zuoxiao Dai, Xiang Xia, Tao Li, Zhirui Wang

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Proceedings Volume 8417, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 841724 (2012) https://doi.org/10.1117/12.975180
Event: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2012), 2012, Xiamen, China

Abstract

Moving mirror tilt, which causes misalignment of two reflectors, is a key issue in Fourier Transform Infrared Spectrometer (FTIRS). Dynamic alignment system (DAS) is adopted to solve misalignment problem. High precision detection of dynamic misalignment angle is one of the most important steps in DAS, mainly upon which the adjustment performances of DAS depend. A new measuring algorithm is presented which is based on amplitude detecting ^[1][2] between laser interference signals generated by reference laser source in this paper. Mathematical analysis is described and experiment results are shown. These results show that the measuring precision of 0.6 micro-radians of dynamic tilting angle is achieved with this method. This is a guarantee for a FTIRS to acquire high interference efficiency.

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Xiaojie Sun, Jianwen Hua, Zuoxiao Dai, Xiang Xia, Tao Li, and Zhirui Wang "Detection of moving mirror tilt in Fourier transform infrared spectrometer", Proc. SPIE 8417, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 841724 (15 October 2012); https://doi.org/10.1117/12.975180

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