Error analysis of sub-aperture stitching interferometry

Xin Jia; Fuchao Xu; Weimin Xie; Tingwen Xing

doi:10.1117/12.977639

15 October 2012 Error analysis of sub-aperture stitching interferometry

Xin Jia, Fuchao Xu, Weimin Xie, Tingwen Xing

Proceedings Volume 8417, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 84172X (2012) https://doi.org/10.1117/12.977639
Event: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2012), 2012, Xiamen, China

Abstract

Large-aperture optical elements are widely employed in high-power laser system, astronomy, and outer-space technology. Sub-aperture stitching is an effective way to extend the lateral and vertical dynamic range of a conventional interferometer. With the aim to provide the accuracy of equipment, this paper simulates the arithmetic to analyze the errors. The Selection of stitching mode and setting of the number of subaperture is given. According to the programmed algorithms simulation stitching is performed for testing the algorithm. In this paper, based on the Matlab we simulate the arithmetic of Sub-aperture stitching. The sub-aperture stitching method can also be used to test the free formed surface. The freeformed surface is created by Zernike polynomials. The accuracy has relationship with the errors of tilting, positioning. Through the stitching the medium spatial frequency of the surface can be tested. The results of errors analysis by means of Matlab are shown that how the tilting and positioning errors to influence the testing accuracy. The analysis of errors can also be used in other interferometer systems.

Citation Download Citation

Xin Jia, Fuchao Xu, Weimin Xie, and Tingwen Xing "Error analysis of sub-aperture stitching interferometry", Proc. SPIE 8417, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 84172X (15 October 2012); https://doi.org/10.1117/12.977639

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