Measurement of soft x-ray grazing incidence optical scattering phenomena

Shu-yan Chen; Xin-jun Xu; Li-ping Su

doi:10.1117/12.971318

15 October 2012 Measurement of soft x-ray grazing incidence optical scattering phenomena

Shu-yan Chen, Xin-jun Xu, Li-ping Su

Proceedings Volume 8417, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 841738 (2012) https://doi.org/10.1117/12.971318
Event: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2012), 2012, Xiamen, China

Abstract

The optical performance is severely degraded by surface scattering effect, especially for short wavelength imaging systems. Surface scattering effect is one of important factors degrading imaging performance. Study of non-intuitive surface scattering effect resulted from practical optical fabrication tolerances is a necessary work for optical performance evaluation of high resolution imaging systems. In this paper, a surface scattering numerical model of grazing incidence imaging systems is discussed. Then Soft X-ray optical scattering distribution is measured by soft X-ray reflectometer at different conditions. PSF (point spread function) is computed by experimental data of sample, and compared with PSF analysized by scattering LSI model. It is indicated that we can detect short wavelength optical scattering Phenomena through soft X-ray grazing incidence optical scattering experimentation we did.

Citation Download Citation

Shu-yan Chen, Xin-jun Xu, and Li-ping Su "Measurement of soft x-ray grazing incidence optical scattering phenomena", Proc. SPIE 8417, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 841738 (15 October 2012); https://doi.org/10.1117/12.971318

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