Paper
15 October 2012 A global sub-aperture stitching algorithm and its precision evaluation
Guangda Zhan, Xudong Xu, Zhengxiang Shen, Xiaoqiang Wang, ZhanShan Wang, Huasong Liu, Yiqin Ji
Author Affiliations +
Proceedings Volume 8417, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 841742 (2012) https://doi.org/10.1117/12.979608
Event: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2012), 2012, Xiamen, China
Abstract
Sub-aperture stitching interferometry is a method to test the surface of the large optics, which can effectively extend the lateral range of the standard interferometer and can also enhance its lateral resolution. The stitching algorithm based on the overlapping area plays a very important role in sub-aperture stitching interferometry. Due to the misalignment in the sub-aperture test cycle, relatively tilt and shift are calibrated. And the global stitching method is applied to minimize the differences of phase distributions in the overlapping areas. The inspection of stitching quality of the overlapping area is also necessary after the interferograms which have been stitched. This paper uses the statistical principle to evaluate the quality of the overlapping area.
© (2012) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Guangda Zhan, Xudong Xu, Zhengxiang Shen, Xiaoqiang Wang, ZhanShan Wang, Huasong Liu, and Yiqin Ji "A global sub-aperture stitching algorithm and its precision evaluation", Proc. SPIE 8417, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 841742 (15 October 2012); https://doi.org/10.1117/12.979608
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CITATIONS
Cited by 2 scholarly publications.
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KEYWORDS
Interferometers

Stitching interferometry

Calibration

Evolutionary algorithms

Inspection

Optical components

Optical testing

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