2 July 2013 Effect of the edge roughness of the pinhole in point diffraction interferometer on light diffraction
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The quality of the reference wave front in point diffraction interferometer (PDI) is mainly determined by pinhole diameter, pinhole edge roughness and so on. The edge roughness of an actually electric beam etched pinhole is determined by least square fitting method. The Gaussian noise with zero means and σ root mean square (RMS) is added to a perfect pinhole to model the edge roughness pinhole. Based on Rayleigh-Sommegeld diffraction formula, the quality of the far field wave front diffracted by a rough edge pinhole is analyzed in detail. Pinhole edge roughness mainly causes trefoil and coma aberrations in diffracted wave front. For pinholes with diameters from 400 nm to 1000 nm, when the edge roughness σ are 0 nm, 15 nm and 30 nm, the RMS deviation of the diffracted wave fronts are in the order of 10-8 λ, 10-4 λ and 10-3 λ, respectively. The results show that pinhole edge roughness has a significance infection on wave front errors, while it has little to do with the intensity distribution in the diffracted wave front. The edge roughness of the reality pinhole used in PDI is 2.37 nm, and the wave front errors of the wave front diffracted from this pinhole can reach 0.08 nm RMS.
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Zengxiong Lu, Zengxiong Lu, Chunshui Jin, Chunshui Jin, Dongmei Ma, Dongmei Ma, Haitao Zhang, Haitao Zhang, } "Effect of the edge roughness of the pinhole in point diffraction interferometer on light diffraction", Proc. SPIE 8418, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Smart Structures, Micro- and Nano-Optical Devices, and Systems, 84180H (2 July 2013); doi: 10.1117/12.976875; https://doi.org/10.1117/12.976875

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