Depth-segmented partial-wave microscopic spectroscopy for subsurface defects' micro-nano structure detection and characterization

Qianqian Wang; Zhihua Ding

doi:10.1117/12.970518

15 October 2012 Depth-segmented partial-wave microscopic spectroscopy for subsurface defects' micro-nano structure detection and characterization

Qianqian Wang, Zhihua Ding

Author Affiliations +

Proceedings Volume 8418, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Smart Structures, Micro- and Nano-Optical Devices, and Systems; 84180P (2012) https://doi.org/10.1117/12.970518
Event: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2012), 2012, Xiamen, China

Abstract

Nondestructive surface inspection technology is getting mature, nevertheless, there is an urgent requirement for method capable of detection and characterization of the subsurface defects at micron to nanometer scales. In this paper, we propose a method for the detection and characterization of the subsurface defects based on the depth-segmented partial-wave microscopic spectroscopy. By combination of optical coherence tomography with partial-wave microscopic spectroscopy, depth-segmented partial-wave microscopic spectroscopy capable of micro-nano structure detection and characterization at specific depth range is put forward.

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Qianqian Wang and Zhihua Ding "Depth-segmented partial-wave microscopic spectroscopy for subsurface defects' micro-nano structure detection and characterization", Proc. SPIE 8418, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Smart Structures, Micro- and Nano-Optical Devices, and Systems, 84180P (15 October 2012); https://doi.org/10.1117/12.970518

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